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Microelectromechanical systems
Results: 938

#	Item
331	Molecular Devices: A Potential Replacement for Semiconductors Anthony Moeller NIST Semiconductor Electronics Division July 27, 2004 Add to Reading List Source URL: spsnational.org Language: English - Date: 2006-11-14 11:17:28 Technology Plasma processing Etching Reactive-ion etching Wafer Photolithography Chemical vapor deposition Microelectromechanical systems Semiconductor device fabrication Materials science Microtechnology
332	Poly-Sige: A High-Q Structural Material for Integrated RF MEMS Add to Reading List Source URL: oxidemems.ece.cornell.edu Language: English - Date: 2007-03-04 14:11:52 Integrated circuits Silicon RF MEMS Silicon-germanium Electronic design Microelectromechanical systems Resonator Polycrystalline silicon CMOS Chemistry Electronic engineering Physics
333	Multi-scale Analysis of MEMS Sensors Subject to Drop Impacts Add to Reading List Source URL: www.mdpi.org Language: English - Date: 2007-09-07 04:43:21 Microtechnology Physics Electrical engineering Mechanical engineering Microelectromechanical systems Sensors Accelerometer Strength of materials Polycrystalline silicon Materials science Transducers Technology
334	T ESI DI D OTTORATO U NIVERSIT A` DEGLI S TUDI DI NAPOLI “F EDERICO II” D IPARTIMENTO DI I NGEGNERIA B IOMEDICA , E LETTRONICA E DELLE T ELECOMUNICAZIONI D OTTORATO DI R ICERCA IN I NGEGNERIA E LETTRONICA E DELLE T E Add to Reading List Source URL: www.fedoa.unina.it Language: English - Date: 2014-04-30 15:48:38 Digital holography Physics Microelectromechanical systems Compressed sensing Jem Holography Optics Technology
335	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 3, JUNE[removed]Wafer-Level Packaging Based on Uniquely Orienting Self-Assembly (The DUO-SPASS Processes) Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2006-11-13 22:12:11 Technology Wafer Etching Deep reactive-ion etching Microelectromechanical systems Three-dimensional integrated circuit Thermal oxidation Photolithography LIGA Materials science Microtechnology Semiconductor device fabrication
336	INSTITUTE OF PHYSICS PUBLISHING SMART MATERIALS AND STRUCTURES Smart Mater. Struct[removed]–1184 Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-04 23:46:00 Materials science Technology Microelectromechanical systems Valve actuator Micromachinery Robotics Spacecraft docking and berthing mechanisms Cilium International Space Station Spaceflight Microtechnology Actuators
337	LOW VOLTAGE AND PULL-IN STATE ADJUSTABLE DUAL-SERVO-SCANNING-MIRROR Kerwin Wang1, Mike Sinclair2, Karl F. Böhringer1 1 University of Washington, 2Microsoft Research Seattle, WA 98195 Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-02-07 03:34:26 Technology Energy Microelectromechanical systems Comb drive Torsion spring Microscanner Deformable mirror Microtechnology Actuators Materials science
338	Microsoft Word - Nano2006CKW2.doc Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2006-03-15 16:26:31 Technology Central processing unit Computer cooling Solid Flip chip Solder Integrated circuit Microelectromechanical systems Electronics Electromagnetism Electrical engineering Materials science
339	TEMPLATE BASED ASSEMBLY FOR SOLID STATE COOLING Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2007-08-14 19:20:53 Mechanical engineering Microelectromechanical systems Microtechnology Transducers Flip chip Solder Static electricity Integrated circuit Electromagnetism Physics Electrical engineering
340	DESIGN, FABRICATION, AND CHARACTERIZATION OF SINGLE CRYSTAL SILICON LATCHING SNAP FASTENERS FOR MICRO ASSEMBLY Rama Prasad Sibley School of Mechanical and Aerospace Engineering Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-05 01:35:00 Materials science Construction Metalworking Mechanical engineering Latch Screw Snap fastener Microelectromechanical systems Comb drive Technology Microtechnology Fasteners

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